Terahertz profilometry at 600 GHz with 0.5 microm depth resolution

Terahertz profilometry at 600 GHz with 0.5 microm depth resolution

Characterization of the topography of materials by interferometry in the visible or near-IR wavelength regime becomes difficult or impossible if the surface is rough on the length scale of a tenth of the wavelength and more. In this case, THz radiation can provide an interesting alternative. We demo...

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Veröffentlicht in:Optics express 2008-07, Vol.16 (15), p.11289-11293
Hauptverfasser: Hils, Bernhard, Thomson, Mark D, Löffler, Torsten, von Spiegel, Wolff, am Weg, Christian, Roskos, Hartmut G, de Maagt, Peter, Doyle, Dominic, Geckeler, Ralf D
Format: Artikel
Sprache:eng
Schlagworte:
Interferometry - methods
Materials Testing - methods
Microwaves
Reproducibility of Results
Sensitivity and Specificity
Surface Properties
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Zusammenfassung:Characterization of the topography of materials by interferometry in the visible or near-IR wavelength regime becomes difficult or impossible if the surface is rough on the length scale of a tenth of the wavelength and more. In this case, THz radiation can provide an interesting alternative. We demonstrate heterodyne profilometry at 600 GHz as a method for the accurate determination of surface topography with an achievable expanded standard uncertainty of 0.5 mum.
ISSN:1094-4087