Application of the discrete dipole approximation for dipoles embedded in film

An implementation of the discrete dipole approximation for dipoles embedded in film on substrate is derived. It is capable of predicting the scattering response from various types of subsurface features such as trenches and contact-vias. An arbitrarily shaped subsurface feature is modeled with dipol...

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Veröffentlicht in:	Journal of the Optical Society of America. A, Optics, image science, and vision Optics, image science, and vision, 2008-07, Vol.25 (7), p.1728-1736
Hauptverfasser:	BAE, Euiwon, HAIPING ZHANG, HIRLEMAN, E. Daniel
Format:	Artikel
Sprache:	eng
Schlagworte:	Diffraction and scattering Exact sciences and technology Fundamental areas of phenomenology (including applications) Optics Physics Wave optics
Online-Zugang:	Volltext
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