Miniature all-silica fiber optic pressure and acoustic sensors

We present a miniature diaphragm-based Fabry-Perot (F-P) interferometric fiber optic sensor fabricated by novel techniques for pressure or acoustic wave measurement that is only approximately 0.32 mm in diameter. By choosing different diaphragm thicknesses and effective diameters, we obtain a sensor...

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Veröffentlicht in:	Optics letters 2005-12, Vol.30 (24), p.3269-3271
Hauptverfasser:	JUNCHENG XU, XINGWEI WANG, COOPER, Kristie L, ANBO WANG
Format:	Artikel
Sprache:	eng
Schlagworte:	Applied sciences Circuit properties Electric, optical and optoelectronic circuits Electronics Exact sciences and technology Integrated optics. Optical fibers and wave guides Optical and optoelectronic circuits Sensors, gyros
Online-Zugang:	Volltext
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