TaSi2 Nanowires: A Potential Field Emitter and Interconnect
TaSi2 nanowires have been synthesized on a Si substrate by annealing NiSi2 films at 950 °C in an ambient containing Ta vapor. The nanowires could be grown up to 13 μm in length. Field-emission measurements show that the turn-on field is low at 4−4.5 V/μm and the threshold field is down to 6 V/μm wit...
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| Veröffentlicht in: | Nano letters 2006-08, Vol.6 (8), p.1637-1644 |
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| container_end_page | 1644 |
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| container_issue | 8 |
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| container_title | Nano letters |
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| creator | Chueh, Yu-Lun Ko, Mong-Tzong Chou, Li-Jen Chen, Lih-Juann Wu, Cen-Shawn Chen, Chii-Dong |
| description | TaSi2 nanowires have been synthesized on a Si substrate by annealing NiSi2 films at 950 °C in an ambient containing Ta vapor. The nanowires could be grown up to 13 μm in length. Field-emission measurements show that the turn-on field is low at 4−4.5 V/μm and the threshold field is down to 6 V/μm with the field enhancement factor as high as 1800. The metallic TaSi2 nanowires exhibit excellent electrical properties with a remarkable high failure current density of 3 × 108 A cm-2. In addition, effects of annealing temperatures and capability of metal silicide mediation layer on the growth of nanowires are addressed. This simple approach promises future applications in nanoelectronics and nano-optoelectronics. |
| doi_str_mv | 10.1021/nl060614n |
| format | Article |
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The nanowires could be grown up to 13 μm in length. Field-emission measurements show that the turn-on field is low at 4−4.5 V/μm and the threshold field is down to 6 V/μm with the field enhancement factor as high as 1800. The metallic TaSi2 nanowires exhibit excellent electrical properties with a remarkable high failure current density of 3 × 108 A cm-2. In addition, effects of annealing temperatures and capability of metal silicide mediation layer on the growth of nanowires are addressed. 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Ko, Mong-Tzong ; Chou, Li-Jen ; Chen, Lih-Juann ; Wu, Cen-Shawn ; Chen, Chii-Dong</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-a335t-1f2ae7ff998073c7138e9f6317dce4190222b0fc9c0a8d0721c7f13ce8821ef83</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2006</creationdate><topic>Condensed matter: electronic structure, electrical, magnetic, and optical properties</topic><topic>Cross-disciplinary physics: materials science; rheology</topic><topic>Crystallization - methods</topic><topic>Electric Conductivity</topic><topic>Electric Wiring</topic><topic>Electromagnetic Fields</topic><topic>Electron and ion emission by liquids and solids; impact phenomena</topic><topic>Electronic structure and electrical properties of surfaces, interfaces, thin films and low-dimensional structures</topic><topic>Electronic transport phenomena in thin films and low-dimensional structures</topic><topic>Equipment Design</topic><topic>Equipment Failure Analysis</topic><topic>Exact sciences and technology</topic><topic>Feasibility Studies</topic><topic>Field emission, ionization, evaporation, and desorption</topic><topic>Materials science</topic><topic>Materials Testing</topic><topic>Nanoscale materials and structures: fabrication and characterization</topic><topic>Nanotechnology - instrumentation</topic><topic>Nanotechnology - methods</topic><topic>Nanotubes - chemistry</topic><topic>Nanotubes - ultrastructure</topic><topic>Other topics in nanoscale materials and structures</topic><topic>Particle Size</topic><topic>Physics</topic><topic>Quantum wires</topic><topic>Semiconductors</topic><topic>Silicon - analysis</topic><topic>Silicon - chemistry</topic><topic>Tantalum - analysis</topic><topic>Tantalum - chemistry</topic><topic>Temperature</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Chueh, Yu-Lun</creatorcontrib><creatorcontrib>Ko, Mong-Tzong</creatorcontrib><creatorcontrib>Chou, Li-Jen</creatorcontrib><creatorcontrib>Chen, Lih-Juann</creatorcontrib><creatorcontrib>Wu, Cen-Shawn</creatorcontrib><creatorcontrib>Chen, Chii-Dong</creatorcontrib><collection>Pascal-Francis</collection><collection>Medline</collection><collection>MEDLINE</collection><collection>MEDLINE (Ovid)</collection><collection>MEDLINE</collection><collection>MEDLINE</collection><collection>PubMed</collection><collection>MEDLINE - Academic</collection><jtitle>Nano letters</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Chueh, Yu-Lun</au><au>Ko, Mong-Tzong</au><au>Chou, Li-Jen</au><au>Chen, Lih-Juann</au><au>Wu, Cen-Shawn</au><au>Chen, Chii-Dong</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>TaSi2 Nanowires: A Potential Field Emitter and Interconnect</atitle><jtitle>Nano letters</jtitle><addtitle>Nano Lett</addtitle><date>2006-08</date><risdate>2006</risdate><volume>6</volume><issue>8</issue><spage>1637</spage><epage>1644</epage><pages>1637-1644</pages><issn>1530-6984</issn><eissn>1530-6992</eissn><abstract>TaSi2 nanowires have been synthesized on a Si substrate by annealing NiSi2 films at 950 °C in an ambient containing Ta vapor. 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| subjects | Condensed matter: electronic structure, electrical, magnetic, and optical properties Cross-disciplinary physics: materials science rheology Crystallization - methods Electric Conductivity Electric Wiring Electromagnetic Fields Electron and ion emission by liquids and solids impact phenomena Electronic structure and electrical properties of surfaces, interfaces, thin films and low-dimensional structures Electronic transport phenomena in thin films and low-dimensional structures Equipment Design Equipment Failure Analysis Exact sciences and technology Feasibility Studies Field emission, ionization, evaporation, and desorption Materials science Materials Testing Nanoscale materials and structures: fabrication and characterization Nanotechnology - instrumentation Nanotechnology - methods Nanotubes - chemistry Nanotubes - ultrastructure Other topics in nanoscale materials and structures Particle Size Physics Quantum wires Semiconductors Silicon - analysis Silicon - chemistry Tantalum - analysis Tantalum - chemistry Temperature |
| title | TaSi2 Nanowires: A Potential Field Emitter and Interconnect |
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