Determination of optical parameters and thickness of weakly absorbing thin films from reflectance and transmittance spectra

A method for determining the optical constants and the thickness of weakly absorbing thin films on substrates is proposed. In this method only the reflectance and transmittance spectra obtained at a single arbitrary angle of incidence are used, provided that the former reveals several interference e...

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Veröffentlicht in:	Applied Optics 2006-07, Vol.45 (19), p.4547-4553
Hauptverfasser:	Kutavichus, Vitaly P, Filippov, Valery V, Huzouski, Vitali H
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
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