All-fiber high-sensitivity pressure sensor with SiO2 diaphragm

The design and fabrication of a miniature fiber Fabry-Perot pressure sensor with a diameter of 125 microm are presented. The essential element in the process is a thin SiO2 diaphragm that is fusion spliced at the hollow end of an optical fiber. Good repeatability and high sensitivity of the sensor a...

Ausführliche Beschreibung

Bibliographische Detailangaben

Veröffentlicht in:	Optics letters 2005-08, Vol.30 (16), p.2071-2073
Hauptverfasser:	DONLAGIC, Denis, CIBULA, Edvard
Format:	Artikel
Sprache:	eng
Schlagworte:	Applied sciences Circuit properties Electric, optical and optoelectronic circuits Electronics Exact sciences and technology General equipment and techniques Instruments, apparatus, components and techniques common to several branches of physics and astronomy Integrated optics. Optical fibers and wave guides Optical and optoelectronic circuits Other fiber-optical devices Physics Sensors (chemical, optical, electrical, movement, gas, etc.) remote sensing Sensors, gyros
Online-Zugang:	Volltext
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!