Fabry-Perot diaphragm fiber-optic sensor

The general theory of a diaphragm fiber-optic sensor (DFOS) is proposed. We use a critical test to determine if a DFOS is based on Fabry-Perot interference or intensity modulation. By use of the critical test, this is the first design, to the best of our knowledge, of a purely Fabry-Perot DFOS, fabr...

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Veröffentlicht in:Applied Optics 2007-11, Vol.46 (31), p.7614-7619
Hauptverfasser: Chin, Ken K, Sun, Yan, Feng, Guanhua, Georgiou, George E, Guo, Kangzhu, Niver, Edip, Roman, Harry, Noe, Karen
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container_end_page 7619
container_issue 31
container_start_page 7614
container_title Applied Optics
container_volume 46
creator Chin, Ken K
Sun, Yan
Feng, Guanhua
Georgiou, George E
Guo, Kangzhu
Niver, Edip
Roman, Harry
Noe, Karen
description The general theory of a diaphragm fiber-optic sensor (DFOS) is proposed. We use a critical test to determine if a DFOS is based on Fabry-Perot interference or intensity modulation. By use of the critical test, this is the first design, to the best of our knowledge, of a purely Fabry-Perot DFOS, fabricated with microelectromechanical system technology, and characterized as an audible microphone and ultrasonic hydrophone with orders of improvement in signal-to-noise ratio.
doi_str_mv 10.1364/AO.46.007614
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title Fabry-Perot diaphragm fiber-optic sensor
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