Converting Ceria Polyhedral Nanoparticles into Single-Crystal Nanospheres

Ceria nanoparticles are one of the key abrasive materials for chemical-mechanical planarization of advanced integrated circuits. However, ceria nanoparticles synthesized by existing techniques are irregularly faceted, and they scratch the silicon wafers and increase defect concentrations. We develop...

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Veröffentlicht in:	Science (American Association for the Advancement of Science) 2006-06, Vol.312 (5779), p.1504-1508
Hauptverfasser:	Feng, Xiangdong, Sayle, Dean C, Wang, Zhong Lin, Paras, M. Sharon, Santora, Brian, Sutorik, Anthony C, Sayle, Thi X.T, Yang, Yi, Ding, Yong, Wang, Xudong, Her, Yie-Shein
Format:	Artikel
Sprache:	eng
Schlagworte:	Abrasives Atoms Cerium Cross-disciplinary physics: materials science rheology Crystallization Crystals Exact sciences and technology Materials science Nanocrystalline materials Nanoparticles Nanoscale materials and structures: fabrication and characterization Oxides Physics Polishing Semiconductor wafers Silicon Single crystals Slurries
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