Application of spatially and temporally apodized non-confocal acoustic transmission microscopy to imaging of directly bonded wafers

Application of a line-shaped point spread function (PSF) to imaging of void defects in directly bonded wafers is considered. Two non-confocally adjusted spherical transducers are employed to implement an acoustic microscope operating in transmission with a time dependent point spread function, whose...

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Veröffentlicht in:Ultrasonics 2006, Vol.44 (1), p.54-63
Hauptverfasser: Twerdowski, Evgeny, Wannemacher, Reinhold, Razek, Nasser, Schindler, Axel, Grill, Wolfgang
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Sprache:eng
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