Application of spatially and temporally apodized non-confocal acoustic transmission microscopy to imaging of directly bonded wafers
Application of a line-shaped point spread function (PSF) to imaging of void defects in directly bonded wafers is considered. Two non-confocally adjusted spherical transducers are employed to implement an acoustic microscope operating in transmission with a time dependent point spread function, whose...
Gespeichert in:
| Veröffentlicht in: | Ultrasonics 2006, Vol.44 (1), p.54-63 |
|---|---|
| Hauptverfasser: | , , , , |
| Format: | Artikel |
| Sprache: | eng |
| Schlagworte: | |
| Online-Zugang: | Volltext |
| Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
| container_end_page | 63 |
|---|---|
| container_issue | 1 |
| container_start_page | 54 |
| container_title | Ultrasonics |
| container_volume | 44 |
| creator | Twerdowski, Evgeny Wannemacher, Reinhold Razek, Nasser Schindler, Axel Grill, Wolfgang |
| description | Application of a line-shaped point spread function (PSF) to imaging of void defects in directly bonded wafers is considered. Two non-confocally adjusted spherical transducers are employed to implement an acoustic microscope operating in transmission with a time dependent point spread function, whose shape is optimized by both temporal apodization of the received signal and spatial apodization of the transducer aperture. Strong imaging artifacts resulting from the generation and detection of edge waves are eliminated in this way. It is shown by several examples that only a broadband system can be utilized in order to obtain a line-shaped PSF suitable for imaging. |
| doi_str_mv | 10.1016/j.ultras.2005.08.001 |
| format | Article |
| fullrecord | <record><control><sourceid>proquest_cross</sourceid><recordid>TN_cdi_proquest_miscellaneous_67594780</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><els_id>S0041624X0500065X</els_id><sourcerecordid>67594780</sourcerecordid><originalsourceid>FETCH-LOGICAL-c390t-ce977a23b598b8d9d340eacb03a8cf2c2ad5bb974a23b62e84b60ca37e2b56363</originalsourceid><addsrcrecordid>eNp9kE2L1TAUhoMoznX0H4h0o7vWJE3zsRGGwS8YcKPgLiQn6ZBLm9Sk1-G69Y-b0guzc5UTeM7LeR-EXhPcEUz4-2N3mtZsSkcxHjosO4zJE3QgUrBWKS6fogPGjLScsp9X6EUpxwowSfrn6IpwIrik8oD-3izLFMCsIcUmjU1Z6mim6dyY6JrVz0vK-3dJLvzxrokptpDimMBMjYF0KmuApl4SyxxK2XLmADkVSMu5WVMTZnMf4v2W7kL2sNY0m6KrWQ9m9Lm8RM9GMxX_6vJeox-fPn6__dLeffv89fbmroVe4bUFr4QwtLeDklY65XqGvQGLeyNhpECNG6xVgm0Mp14yyzGYXnhqB97z_hq923OXnH6dfFl1PRj8NJnoaw3NxaCYkLiCbAe3GiX7US-5tshnTbDe5Ouj3uXrTb7GUle3de3NJf9kZ-8ely62K_D2AphS7Y3VGYTyyImBCMpV5T7snK82fgefdYHgI_jdn3Yp_P-Sf_-hqQo</addsrcrecordid><sourcetype>Aggregation Database</sourcetype><iscdi>true</iscdi><recordtype>article</recordtype><pqid>67594780</pqid></control><display><type>article</type><title>Application of spatially and temporally apodized non-confocal acoustic transmission microscopy to imaging of directly bonded wafers</title><source>ScienceDirect Journals (5 years ago - present)</source><creator>Twerdowski, Evgeny ; Wannemacher, Reinhold ; Razek, Nasser ; Schindler, Axel ; Grill, Wolfgang</creator><creatorcontrib>Twerdowski, Evgeny ; Wannemacher, Reinhold ; Razek, Nasser ; Schindler, Axel ; Grill, Wolfgang</creatorcontrib><description>Application of a line-shaped point spread function (PSF) to imaging of void defects in directly bonded wafers is considered. Two non-confocally adjusted spherical transducers are employed to implement an acoustic microscope operating in transmission with a time dependent point spread function, whose shape is optimized by both temporal apodization of the received signal and spatial apodization of the transducer aperture. Strong imaging artifacts resulting from the generation and detection of edge waves are eliminated in this way. It is shown by several examples that only a broadband system can be utilized in order to obtain a line-shaped PSF suitable for imaging.</description><identifier>ISSN: 0041-624X</identifier><identifier>EISSN: 1874-9968</identifier><identifier>DOI: 10.1016/j.ultras.2005.08.001</identifier><identifier>PMID: 16176828</identifier><identifier>CODEN: ULTRA3</identifier><language>eng</language><publisher>Amsterdam: Elsevier B.V</publisher><subject>Acoustic signal processing ; Acoustics ; Cross-disciplinary physics: materials science; rheology ; Directly bonded wafers ; Exact sciences and technology ; Fundamental areas of phenomenology (including applications) ; Line-shaped tomography ; Materials science ; Materials testing ; Non-confocal acoustic transmission microscopy ; Physics ; Point spread function ; Time-gated signal acquisition ; Ultrasonics, quantum acoustics, and physical effects of sound</subject><ispartof>Ultrasonics, 2006, Vol.44 (1), p.54-63</ispartof><rights>2005 Elsevier B.V.</rights><rights>2006 INIST-CNRS</rights><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c390t-ce977a23b598b8d9d340eacb03a8cf2c2ad5bb974a23b62e84b60ca37e2b56363</citedby><cites>FETCH-LOGICAL-c390t-ce977a23b598b8d9d340eacb03a8cf2c2ad5bb974a23b62e84b60ca37e2b56363</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://dx.doi.org/10.1016/j.ultras.2005.08.001$$EHTML$$P50$$Gelsevier$$H</linktohtml><link.rule.ids>314,780,784,3548,4022,27922,27923,27924,45994</link.rule.ids><backlink>$$Uhttp://pascal-francis.inist.fr/vibad/index.php?action=getRecordDetail&idt=17517269$$DView record in Pascal Francis$$Hfree_for_read</backlink><backlink>$$Uhttps://www.ncbi.nlm.nih.gov/pubmed/16176828$$D View this record in MEDLINE/PubMed$$Hfree_for_read</backlink></links><search><creatorcontrib>Twerdowski, Evgeny</creatorcontrib><creatorcontrib>Wannemacher, Reinhold</creatorcontrib><creatorcontrib>Razek, Nasser</creatorcontrib><creatorcontrib>Schindler, Axel</creatorcontrib><creatorcontrib>Grill, Wolfgang</creatorcontrib><title>Application of spatially and temporally apodized non-confocal acoustic transmission microscopy to imaging of directly bonded wafers</title><title>Ultrasonics</title><addtitle>Ultrasonics</addtitle><description>Application of a line-shaped point spread function (PSF) to imaging of void defects in directly bonded wafers is considered. Two non-confocally adjusted spherical transducers are employed to implement an acoustic microscope operating in transmission with a time dependent point spread function, whose shape is optimized by both temporal apodization of the received signal and spatial apodization of the transducer aperture. Strong imaging artifacts resulting from the generation and detection of edge waves are eliminated in this way. It is shown by several examples that only a broadband system can be utilized in order to obtain a line-shaped PSF suitable for imaging.</description><subject>Acoustic signal processing</subject><subject>Acoustics</subject><subject>Cross-disciplinary physics: materials science; rheology</subject><subject>Directly bonded wafers</subject><subject>Exact sciences and technology</subject><subject>Fundamental areas of phenomenology (including applications)</subject><subject>Line-shaped tomography</subject><subject>Materials science</subject><subject>Materials testing</subject><subject>Non-confocal acoustic transmission microscopy</subject><subject>Physics</subject><subject>Point spread function</subject><subject>Time-gated signal acquisition</subject><subject>Ultrasonics, quantum acoustics, and physical effects of sound</subject><issn>0041-624X</issn><issn>1874-9968</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2006</creationdate><recordtype>article</recordtype><recordid>eNp9kE2L1TAUhoMoznX0H4h0o7vWJE3zsRGGwS8YcKPgLiQn6ZBLm9Sk1-G69Y-b0guzc5UTeM7LeR-EXhPcEUz4-2N3mtZsSkcxHjosO4zJE3QgUrBWKS6fogPGjLScsp9X6EUpxwowSfrn6IpwIrik8oD-3izLFMCsIcUmjU1Z6mim6dyY6JrVz0vK-3dJLvzxrokptpDimMBMjYF0KmuApl4SyxxK2XLmADkVSMu5WVMTZnMf4v2W7kL2sNY0m6KrWQ9m9Lm8RM9GMxX_6vJeox-fPn6__dLeffv89fbmroVe4bUFr4QwtLeDklY65XqGvQGLeyNhpECNG6xVgm0Mp14yyzGYXnhqB97z_hq923OXnH6dfFl1PRj8NJnoaw3NxaCYkLiCbAe3GiX7US-5tshnTbDe5Ouj3uXrTb7GUle3de3NJf9kZ-8ely62K_D2AphS7Y3VGYTyyImBCMpV5T7snK82fgefdYHgI_jdn3Yp_P-Sf_-hqQo</recordid><startdate>2006</startdate><enddate>2006</enddate><creator>Twerdowski, Evgeny</creator><creator>Wannemacher, Reinhold</creator><creator>Razek, Nasser</creator><creator>Schindler, Axel</creator><creator>Grill, Wolfgang</creator><general>Elsevier B.V</general><general>Elsevier Science</general><scope>IQODW</scope><scope>NPM</scope><scope>AAYXX</scope><scope>CITATION</scope><scope>7X8</scope></search><sort><creationdate>2006</creationdate><title>Application of spatially and temporally apodized non-confocal acoustic transmission microscopy to imaging of directly bonded wafers</title><author>Twerdowski, Evgeny ; Wannemacher, Reinhold ; Razek, Nasser ; Schindler, Axel ; Grill, Wolfgang</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c390t-ce977a23b598b8d9d340eacb03a8cf2c2ad5bb974a23b62e84b60ca37e2b56363</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2006</creationdate><topic>Acoustic signal processing</topic><topic>Acoustics</topic><topic>Cross-disciplinary physics: materials science; rheology</topic><topic>Directly bonded wafers</topic><topic>Exact sciences and technology</topic><topic>Fundamental areas of phenomenology (including applications)</topic><topic>Line-shaped tomography</topic><topic>Materials science</topic><topic>Materials testing</topic><topic>Non-confocal acoustic transmission microscopy</topic><topic>Physics</topic><topic>Point spread function</topic><topic>Time-gated signal acquisition</topic><topic>Ultrasonics, quantum acoustics, and physical effects of sound</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Twerdowski, Evgeny</creatorcontrib><creatorcontrib>Wannemacher, Reinhold</creatorcontrib><creatorcontrib>Razek, Nasser</creatorcontrib><creatorcontrib>Schindler, Axel</creatorcontrib><creatorcontrib>Grill, Wolfgang</creatorcontrib><collection>Pascal-Francis</collection><collection>PubMed</collection><collection>CrossRef</collection><collection>MEDLINE - Academic</collection><jtitle>Ultrasonics</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Twerdowski, Evgeny</au><au>Wannemacher, Reinhold</au><au>Razek, Nasser</au><au>Schindler, Axel</au><au>Grill, Wolfgang</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Application of spatially and temporally apodized non-confocal acoustic transmission microscopy to imaging of directly bonded wafers</atitle><jtitle>Ultrasonics</jtitle><addtitle>Ultrasonics</addtitle><date>2006</date><risdate>2006</risdate><volume>44</volume><issue>1</issue><spage>54</spage><epage>63</epage><pages>54-63</pages><issn>0041-624X</issn><eissn>1874-9968</eissn><coden>ULTRA3</coden><abstract>Application of a line-shaped point spread function (PSF) to imaging of void defects in directly bonded wafers is considered. Two non-confocally adjusted spherical transducers are employed to implement an acoustic microscope operating in transmission with a time dependent point spread function, whose shape is optimized by both temporal apodization of the received signal and spatial apodization of the transducer aperture. Strong imaging artifacts resulting from the generation and detection of edge waves are eliminated in this way. It is shown by several examples that only a broadband system can be utilized in order to obtain a line-shaped PSF suitable for imaging.</abstract><cop>Amsterdam</cop><pub>Elsevier B.V</pub><pmid>16176828</pmid><doi>10.1016/j.ultras.2005.08.001</doi><tpages>10</tpages></addata></record> |
| fulltext | fulltext |
| identifier | ISSN: 0041-624X |
| ispartof | Ultrasonics, 2006, Vol.44 (1), p.54-63 |
| issn | 0041-624X 1874-9968 |
| language | eng |
| recordid | cdi_proquest_miscellaneous_67594780 |
| source | ScienceDirect Journals (5 years ago - present) |
| subjects | Acoustic signal processing Acoustics Cross-disciplinary physics: materials science rheology Directly bonded wafers Exact sciences and technology Fundamental areas of phenomenology (including applications) Line-shaped tomography Materials science Materials testing Non-confocal acoustic transmission microscopy Physics Point spread function Time-gated signal acquisition Ultrasonics, quantum acoustics, and physical effects of sound |
| title | Application of spatially and temporally apodized non-confocal acoustic transmission microscopy to imaging of directly bonded wafers |
| url | https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-01-11T00%3A53%3A07IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-proquest_cross&rft_val_fmt=info:ofi/fmt:kev:mtx:journal&rft.genre=article&rft.atitle=Application%20of%20spatially%20and%20temporally%20apodized%20non-confocal%20acoustic%20transmission%20microscopy%20to%20imaging%20of%20directly%20bonded%20wafers&rft.jtitle=Ultrasonics&rft.au=Twerdowski,%20Evgeny&rft.date=2006&rft.volume=44&rft.issue=1&rft.spage=54&rft.epage=63&rft.pages=54-63&rft.issn=0041-624X&rft.eissn=1874-9968&rft.coden=ULTRA3&rft_id=info:doi/10.1016/j.ultras.2005.08.001&rft_dat=%3Cproquest_cross%3E67594780%3C/proquest_cross%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_pqid=67594780&rft_id=info:pmid/16176828&rft_els_id=S0041624X0500065X&rfr_iscdi=true |