Use of an energy filter to improve the spatial resolution of electron backscatter diffraction

The electron backscatter diffraction (EBSD) analytical technique is invaluable for determining the crystallography of bulk alloys, thin films, and nanoparticles. However, our physical understanding of EBSD pattern generation is incomplete, which hinders our ability to push the limits of EBSD analysi...

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Veröffentlicht in:	Scanning 2009-05, Vol.31 (3), p.114-121
Hauptverfasser:	Bhattacharyya, Abhishek, Eades, John A.
Format:	Artikel
Sprache:	eng
Schlagworte:	crystallography electron-solid interactions microstructure SEM
Online-Zugang:	Volltext
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