High-speed atomic force microscope lithography using a piezo tube scanner driven by a sinusoidal waveform

Improving the throughput of atomic force microscope (AFM) lithography is an important success factor for employing it in nanolithography applications. The conventional motion of the AFM tube scanner is usually driven by triangular-shaped signals, but it is limited in speed due to mechanical instabil...

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Veröffentlicht in:	Ultramicroscopy 2009-07, Vol.109 (8), p.1052-1055
Hauptverfasser:	Kwon, Gwangmin, Kim, Sang-Hyun, Jeong, Meehye, Han, Seung-Heon, Choi, Chang-Son, Han, Seung-Jin, Hong, Jaewan, Lee, Haiwon
Format:	Artikel
Sprache:	eng
Schlagworte:	AFM lithography Nanolithography Organic resists Photo acid generator Sinusoidal waveform signal
Online-Zugang:	Volltext
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