Nanofluidic structures with complex three-dimensional surfaces

Nanofluidic devices have typically explored a design space of patterns limited by a single nanoscale structure depth. A method is presented here for fabricating nanofluidic structures with complex three-dimensional (3D) surfaces, utilizing a single layer of grayscale photolithography and standard in...

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Veröffentlicht in:	Nanotechnology 2009-04, Vol.20 (16), p.165302-165302
Hauptverfasser:	Stavis, Samuel M, Strychalski, Elizabeth A, Gaitan, Michael
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
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