Fabrication and modeling of high-frequency PZT composite thick film membrane resonators

High-frequency, thickness mode resonators were fabricated using a 7 microm piezoelectric transducer (PZT) thick film that was produced using a modified composite ceramic sol-gel process. Initial studies dealt with the integration of the PZT thick film onto the substrate. Zirconium oxide (ZrO2) was s...

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Veröffentlicht in:	IEEE transactions on ultrasonics, ferroelectrics, and frequency control ferroelectrics, and frequency control, 2004-10, Vol.51 (10), p.1255-1261
Hauptverfasser:	DUVAL, Fabrice F. C, DOREY, Robert A, WRIGHT, Robert W, ZHAORONG HUANG, WHATMORE, Roger W
Format:	Artikel
Sprache:	eng
Schlagworte:	Acoustics Exact sciences and technology Fundamental areas of phenomenology (including applications) General equipment and techniques Instruments, apparatus, components and techniques common to several branches of physics and astronomy Physics Transducers Ultrasonics, quantum acoustics, and physical effects of sound
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