Complex periodic micro/nanostructures on 6H-SiC crystal induced by the interference of three femtosecond laser beams

We reported three types of complex micro/nanostructures on 6H-SiC crystal induced by the interferences of three femtosecond laser beams by arranging three types of laser polarization combinations. The micro/nanostructures are composed of two parts: two-dimensional long-periodic micropatterns determi...

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Veröffentlicht in:	Optics letters 2009-03, Vol.34 (6), p.788-790
Hauptverfasser:	JIA, X, JIA, T. Q, DING, L. E, XIONG, P. X, DENG, L, SUN, Z. R, WANG, Z. G, QIU, J. R, XU, Z. Z
Format:	Artikel
Sprache:	eng
Schlagworte:	Biological and medical applications Cross-disciplinary physics: materials science rheology Exact sciences and technology Fundamental areas of phenomenology (including applications) Materials science Methods of nanofabrication Nanolithography Optics Physics
Online-Zugang:	Volltext
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