Accuracy and precision of quantitative energy-dispersive x-ray spectrometry in the environmental scanning electron microscope

The accuracy and precision of quantitative energy‐dispersive x‐ray spectrometry in the environmental scanning electron microscope have been estimated using a series of copper / gold alloys of known composition. The mean values (five to six replicate experiments) had relative errors within ± 5%, and...

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Veröffentlicht in:	Scanning 2004-07, Vol.26 (4), p.167-174
Hauptverfasser:	Carlton, Robert A., Lyman, Charles E., Roberts, James E.
Format:	Artikel
Sprache:	eng
Schlagworte:	accuracy charge neutralization energy-dispersive x-ray spectrometry environmental scanning electron microscopy NIST (NBS) SRM 482
Online-Zugang:	Volltext
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