Spectrally resolved white-light interferometry for 3D inspection of a thin-film layer structure

We describe an improved scheme of spectrally resolved white-light interferometry, which provides 3D visual inspection of a thin-film layer structure with nanometer level resolutions. Compared to the authors' previous method [Appl. Phys. Lett.91, 091903 (2007)APPLAB0003-695110.1063/1.2776015], 3...

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Veröffentlicht in:	Applied Optics 2009-02, Vol.48 (4), p.799-803
Hauptverfasser:	Ghim, Young-Sik, Kim, Seung-Woo
Format:	Artikel
Sprache:	eng
Schlagworte:	CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS INSPECTION INTERFEROMETRY LAYERS SHUTTERS THICKNESS THIN FILMS VISIBLE RADIATION
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