Internal Dielectric Transduction in Bulk-Mode Resonators

This paper investigates electrostatic transduction of a longitudinal-mode silicon acoustic resonator with internal dielectric films. Geometric optimization of internal dielectrically transduced resonators is derived analytically and shown experimentally. Analysis of internal dielectric transduction...

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Veröffentlicht in:	Journal of microelectromechanical systems 2009-12, Vol.18 (6), p.1401-1408
Hauptverfasser:	Weinstein, D., Bhave, S.A.
Format:	Artikel
Sprache:	eng
Schlagworte:	Acoustic transducers Acoustic waves Acoustics acoustoelectric devices capacitance transducers Capacitive sensors Design optimization Dielectric films Dielectrics Electrostatics Frequency Mathematical analysis Optimization Q -factor Resonance Resonators semiconductor devices Silicon Thin films Wavelengths
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