Incorporation of hydrogen in diamond thin films
In this investigation, diamond thin films with grain size ranging from 50 nm to 1 µm deposited using hot filament chemical vapor deposition (HFCVD) have been analyzed by elastic recoil detection analysis (ERDA) for determining hydrogen concentration. Hydrogen concentration in diamond thin films incr...
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| Veröffentlicht in: | Diamond and related materials 2009-10, Vol.18 (10), p.1247-1252 |
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| container_title | Diamond and related materials |
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| creator | Rakha, Sobia Allah Jianqing, Cao Huihao, Xia Guojun, Yu Zhu, Dezhang Gong, Jinlong |
| description | In this investigation, diamond thin films with grain size ranging from 50 nm to 1 µm deposited using hot filament chemical vapor deposition (HFCVD) have been analyzed by elastic recoil detection analysis (ERDA) for determining hydrogen concentration. Hydrogen concentration in diamond thin films increases with decreasing grain size. Raman spectroscopy and X-ray photoelectron spectroscopy (XPS) results showed that part of this hydrogen is bonded to carbon forming C–H bonding. Raman spectra also indicated the increase of non diamond phase with the decrease in crystallite size. Incorporation of hydrogen in the samples and increase of hydrogen content in nanocrystalline sample are discussed. Large separation between filament and substrate used for the synthesis of nanocrystalline film helped to understand the large incorporation of hydrogen in nanocrystalline diamond films during growth. The study addresses the hydrogen trapping in different samples and higher hydrogen concentration in nanocrystallites by considering the synthesis conditions, growth mechanisms for different grain sized diamond films and from the quality of CVD diamond films. |
| doi_str_mv | 10.1016/j.diamond.2009.04.009 |
| format | Article |
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Hydrogen concentration in diamond thin films increases with decreasing grain size. Raman spectroscopy and X-ray photoelectron spectroscopy (XPS) results showed that part of this hydrogen is bonded to carbon forming C–H bonding. Raman spectra also indicated the increase of non diamond phase with the decrease in crystallite size. Incorporation of hydrogen in the samples and increase of hydrogen content in nanocrystalline sample are discussed. Large separation between filament and substrate used for the synthesis of nanocrystalline film helped to understand the large incorporation of hydrogen in nanocrystalline diamond films during growth. 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Hydrogen concentration in diamond thin films increases with decreasing grain size. Raman spectroscopy and X-ray photoelectron spectroscopy (XPS) results showed that part of this hydrogen is bonded to carbon forming C–H bonding. Raman spectra also indicated the increase of non diamond phase with the decrease in crystallite size. Incorporation of hydrogen in the samples and increase of hydrogen content in nanocrystalline sample are discussed. Large separation between filament and substrate used for the synthesis of nanocrystalline film helped to understand the large incorporation of hydrogen in nanocrystalline diamond films during growth. The study addresses the hydrogen trapping in different samples and higher hydrogen concentration in nanocrystallites by considering the synthesis conditions, growth mechanisms for different grain sized diamond films and from the quality of CVD diamond films.</description><subject>Chemical vapor deposition (including plasma-enhanced cvd, mocvd, etc.)</subject><subject>Condensed matter: structure, mechanical and thermal properties</subject><subject>Cross-disciplinary physics: materials science; rheology</subject><subject>CVD diamond films</subject><subject>ERDA</subject><subject>Exact sciences and technology</subject><subject>Fullerenes and related materials; diamonds, graphite</subject><subject>Grain size dependence</subject><subject>Hydrogen</subject><subject>Materials science</subject><subject>Methods of deposition of films and coatings; film growth and epitaxy</subject><subject>Nanoscale materials and structures: fabrication and characterization</subject><subject>Other topics in nanoscale materials and structures</subject><subject>Physics</subject><subject>Specific materials</subject><subject>Structure and morphology; 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| subjects | Chemical vapor deposition (including plasma-enhanced cvd, mocvd, etc.) Condensed matter: structure, mechanical and thermal properties Cross-disciplinary physics: materials science rheology CVD diamond films ERDA Exact sciences and technology Fullerenes and related materials diamonds, graphite Grain size dependence Hydrogen Materials science Methods of deposition of films and coatings film growth and epitaxy Nanoscale materials and structures: fabrication and characterization Other topics in nanoscale materials and structures Physics Specific materials Structure and morphology thickness Surfaces and interfaces thin films and whiskers (structure and nonelectronic properties) Thin film structure and morphology XPS |
| title | Incorporation of hydrogen in diamond thin films |
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