Fiber-Pigtailed Electrothermal MEMS Iris VOA

A high-performance variable optical attenuator, which is based on an electrothermally actuated iris with a square pupil, is demonstrated. The device is fabricated from two separate dies that are formed by deep reactive ion etching of bonded silicon-on-insulator material. The iris die is inserted int...

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Veröffentlicht in:	Journal of lightwave technology 2007-08, Vol.25 (8), p.2159-2167
Hauptverfasser:	Veladi, H., Syms, R.R.A., Zou, H.
Format:	Artikel
Sprache:	eng
Schlagworte:	Applied sciences Blades Bonding Devices Diffraction theory Electronics Electrothermal effects Etching Exact sciences and technology Finite element analysis Iris Mathematical models Micro- and nanoelectromechanical devices (mems/nems) Micro-Opto-Electromechanical Systems (MOEMS) Microelectromechanical systems (MEMS) Microelectronic fabrication (materials and surfaces technology) Micromechanical devices Noise levels Optical attenuators Optical fiber devices Optical fibers Optical materials Resonant frequencies Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices Silicon on insulator technology variable optical attenuator (VOA) Wavelengths
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