Micromachined Electric-Field Sensor to Measure AC and DC Fields in Power Systems

This paper describes a new type of electric-field sensor that has been fabricated using micromachining technology. This micromachined sensor is dramatically smaller than conventional field mills, possessing a field chopping shutter measuring only 1 mm 2 . The shutter is moved using thermal actuators...

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Veröffentlicht in:IEEE transactions on power delivery 2009-07, Vol.24 (3), p.988-995
Hauptverfasser: Wijeweera, G., Bahreyni, B., Shafai, C., Rajapakse, A., Swatek, D.R.
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container_end_page 995
container_issue 3
container_start_page 988
container_title IEEE transactions on power delivery
container_volume 24
creator Wijeweera, G.
Bahreyni, B.
Shafai, C.
Rajapakse, A.
Swatek, D.R.
description This paper describes a new type of electric-field sensor that has been fabricated using micromachining technology. This micromachined sensor is dramatically smaller than conventional field mills, possessing a field chopping shutter measuring only 1 mm 2 . The shutter is moved using thermal actuators, thereby eliminating the wear and tear associated with rotating and moving elements of field mills. The sensor requires minimal operating power, with the shutter being driven by a 75-mV drive signal while consuming only 70 muW. The field chopping shutter operates at ~ 4200 Hz, enabling the measurement of both ac and dc fields. Two sets of sense electrodes enable differential field measurements and, therefore, do not require a reference ground potential. The sensor has a linear response to the electric-field amplitude and has demonstrated that it is capable of measuring a dc field as small as 42 V/m. This miniature sensor is the smallest sensor with such a resolution for use in power engineering applications.
doi_str_mv 10.1109/TPWRD.2008.2008427
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This micromachined sensor is dramatically smaller than conventional field mills, possessing a field chopping shutter measuring only 1 mm 2 . The shutter is moved using thermal actuators, thereby eliminating the wear and tear associated with rotating and moving elements of field mills. The sensor requires minimal operating power, with the shutter being driven by a 75-mV drive signal while consuming only 70 muW. The field chopping shutter operates at ~ 4200 Hz, enabling the measurement of both ac and dc fields. Two sets of sense electrodes enable differential field measurements and, therefore, do not require a reference ground potential. The sensor has a linear response to the electric-field amplitude and has demonstrated that it is capable of measuring a dc field as small as 42 V/m. 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source IEEE Xplore
subjects Actuators
Applied sciences
Computer science
control theory
systems
Control theory. Systems
Cutting
Direct current
Direct current networks
Electric field measurement
electric fields
Electric power generation
Electric variables measurement
Electrical engineering. Electrical power engineering
Electrical machines
Electrical power engineering
Electrodes
Exact sciences and technology
Micromachining
Micromechanics
Milling machines
Mills
Miscellaneous
Power engineering
Power measurement
Power networks and lines
Power system measurements
Robotics
Sensor phenomena and characterization
Sensor systems
Sensors
Shutters
title Micromachined Electric-Field Sensor to Measure AC and DC Fields in Power Systems
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