Continuous-time interface for a micromachined capacitive accelerometer with NEA of 4 [MathML equation]g and bandwidth of 300 Hz

Continuous-time interface for a micromachined capacitive accelerometer with NEA of 4 [MathML equation]g and bandwidth of 300 Hz

A continuous-time accelerometer interface is feasible when a high dynamic range together with a wide signal band is required. In this paper the implementation of a continuous-time force-feedback loop for a capacitive sensor element with a full-scale signal of +/-1.5 g is presented. The interface is...

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Veröffentlicht in:Sensors and actuators. A. Physical. 2009-08, Vol.154 (1), p.46-56
Hauptverfasser: Aaltonen, Lasse, Halonen, Kari
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Halonen, Kari
description A continuous-time accelerometer interface is feasible when a high dynamic range together with a wide signal band is required. In this paper the implementation of a continuous-time force-feedback loop for a capacitive sensor element with a full-scale signal of +/-1.5 g is presented. The interface is measured to attain a noise equivalent acceleration (NEA) density of 500 [MathML equation] at 30 Hz for the on-chip digitized output and 300 [MathML equation] at 30 Hz for the analog output using a capacitive half-bridge sensor element with a single pair of electrodes. The essential circuit structures of the closed-loop sensor will be presented and analyzed in detail.
doi_str_mv 10.1016/j.sna.2009.07.011
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title Continuous-time interface for a micromachined capacitive accelerometer with NEA of 4 [MathML equation]g and bandwidth of 300 Hz
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