Transparent conducting amorphous Zn–In–Sn–O anode for flexible organic light-emitting diodes

Amorphous Zn–In–Sn–O (ZITO) films are grown by an rf magnetron cosputtering system from ceramic oxide targets of ZnO and ITO onto a flexible polyether sulfone (PES) substrate. The films exhibit resistivity as low as 1.22 × 1 0 − 3 Ω cm and optical transparency comparable to greater than that of Sn-d...

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Veröffentlicht in:Solid state communications 2010, Vol.150 (3), p.223-226
Hauptverfasser: Heo, Gi-Seok, Matsumoto, Yuji, Gim, In-Gi, Lee, Hyun-Kee, Park, Jong-Woon, Kim, Tae-Won
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container_end_page 226
container_issue 3
container_start_page 223
container_title Solid state communications
container_volume 150
creator Heo, Gi-Seok
Matsumoto, Yuji
Gim, In-Gi
Lee, Hyun-Kee
Park, Jong-Woon
Kim, Tae-Won
description Amorphous Zn–In–Sn–O (ZITO) films are grown by an rf magnetron cosputtering system from ceramic oxide targets of ZnO and ITO onto a flexible polyether sulfone (PES) substrate. The films exhibit resistivity as low as 1.22 × 1 0 − 3 Ω cm and optical transparency comparable to greater than that of Sn-doped indium oxide (ITO) films. The amorphous ZITO films have good mechanical durability compared to ITO films against the external dynamic stress measured by the bending tester. The deposited ZITO film has been used as a transparent anode in fabrication of the flexible organic light-emitting diode (OLED) by the cluster organic evaporator system. The amorphous ZITO anode-based flexible OLED shows comparable or superior current density and luminance characteristics compared to that of the amorphous ITO-based OLED.
doi_str_mv 10.1016/j.ssc.2009.10.042
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subjects A. ITO
A. ZITO
A. ZnO
A. Zn–In–Sn–O
Applied sciences
Electronics
Exact sciences and technology
Optoelectronic devices
Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
title Transparent conducting amorphous Zn–In–Sn–O anode for flexible organic light-emitting diodes
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