Simple structured polydimethylsiloxane microvalve actuated by external air pressure
Abstract This article describes a simple structured microvalve made of polydimethylsiloxane (PDMS) and glass. For easy operation, the microvalve is actuated by external air pressure. The microvalve is fabricated by replica moulding using a negative photoresist (SU-8) as the mould. For low cost and b...
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| Veröffentlicht in: | Proceedings of the Institution of Mechanical Engineers. Part C, Journal of mechanical engineering science Journal of mechanical engineering science, 2006-08, Vol.220 (8), p.1283-1288 |
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| container_end_page | 1288 |
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| container_issue | 8 |
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| container_title | Proceedings of the Institution of Mechanical Engineers. Part C, Journal of mechanical engineering science |
| container_volume | 220 |
| creator | Lee, S-W Kim, D-J Ahn, Y Chai, Y G |
| description | Abstract
This article describes a simple structured microvalve made of polydimethylsiloxane (PDMS) and glass. For easy operation, the microvalve is actuated by external air pressure. The microvalve is fabricated by replica moulding using a negative photoresist (SU-8) as the mould. For low cost and biocompatibility, PDMS is used as the chip material. The PDMS valve is bonded to a Pyrex glass substrate using an O2 plasma surface treatment. It was found that no leakage occurs under a valve-actuating air pressure of 0.35 MPa when the injection pressure of liquid in the microchannel of the valve is 0.01-0.04 MPa. The fabricated microvalve is applied to a microfluidic chip having one inlet and two outlet channels. Fluid flow is controlled by the microvalve. |
| doi_str_mv | 10.1243/09544062JMES177 |
| format | Article |
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This article describes a simple structured microvalve made of polydimethylsiloxane (PDMS) and glass. For easy operation, the microvalve is actuated by external air pressure. The microvalve is fabricated by replica moulding using a negative photoresist (SU-8) as the mould. For low cost and biocompatibility, PDMS is used as the chip material. The PDMS valve is bonded to a Pyrex glass substrate using an O2 plasma surface treatment. It was found that no leakage occurs under a valve-actuating air pressure of 0.35 MPa when the injection pressure of liquid in the microchannel of the valve is 0.01-0.04 MPa. The fabricated microvalve is applied to a microfluidic chip having one inlet and two outlet channels. Fluid flow is controlled by the microvalve.</description><identifier>ISSN: 0954-4062</identifier><identifier>EISSN: 2041-2983</identifier><identifier>DOI: 10.1243/09544062JMES177</identifier><language>eng</language><publisher>London, England: SAGE Publications</publisher><subject>Biocompatibility ; Borosilicate glass ; External pressure ; Fluid dynamics ; Fluid flow ; Glass substrates ; Mechanical engineering ; Molding (process) ; Molds ; Pneumatics ; Polydimethylsiloxane ; Pressure ; Product design ; Replicas ; Silicone resins ; Surface treatment ; Valves</subject><ispartof>Proceedings of the Institution of Mechanical Engineers. Part C, Journal of mechanical engineering science, 2006-08, Vol.220 (8), p.1283-1288</ispartof><rights>2006 Institution of Mechanical Engineers</rights><rights>Copyright Professional Engineering Publishing Ltd Aug 2006</rights><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c395t-7579d19be554c97bb79be4315998651f1809f38c4a55378c9e2aaeb8297108c53</citedby><cites>FETCH-LOGICAL-c395t-7579d19be554c97bb79be4315998651f1809f38c4a55378c9e2aaeb8297108c53</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktopdf>$$Uhttps://journals.sagepub.com/doi/pdf/10.1243/09544062JMES177$$EPDF$$P50$$Gsage$$H</linktopdf><linktohtml>$$Uhttps://journals.sagepub.com/doi/10.1243/09544062JMES177$$EHTML$$P50$$Gsage$$H</linktohtml><link.rule.ids>314,776,780,21798,27901,27902,43597,43598</link.rule.ids></links><search><creatorcontrib>Lee, S-W</creatorcontrib><creatorcontrib>Kim, D-J</creatorcontrib><creatorcontrib>Ahn, Y</creatorcontrib><creatorcontrib>Chai, Y G</creatorcontrib><title>Simple structured polydimethylsiloxane microvalve actuated by external air pressure</title><title>Proceedings of the Institution of Mechanical Engineers. Part C, Journal of mechanical engineering science</title><description>Abstract
This article describes a simple structured microvalve made of polydimethylsiloxane (PDMS) and glass. For easy operation, the microvalve is actuated by external air pressure. The microvalve is fabricated by replica moulding using a negative photoresist (SU-8) as the mould. For low cost and biocompatibility, PDMS is used as the chip material. The PDMS valve is bonded to a Pyrex glass substrate using an O2 plasma surface treatment. It was found that no leakage occurs under a valve-actuating air pressure of 0.35 MPa when the injection pressure of liquid in the microchannel of the valve is 0.01-0.04 MPa. The fabricated microvalve is applied to a microfluidic chip having one inlet and two outlet channels. Fluid flow is controlled by the microvalve.</description><subject>Biocompatibility</subject><subject>Borosilicate glass</subject><subject>External pressure</subject><subject>Fluid dynamics</subject><subject>Fluid flow</subject><subject>Glass substrates</subject><subject>Mechanical engineering</subject><subject>Molding (process)</subject><subject>Molds</subject><subject>Pneumatics</subject><subject>Polydimethylsiloxane</subject><subject>Pressure</subject><subject>Product design</subject><subject>Replicas</subject><subject>Silicone resins</subject><subject>Surface treatment</subject><subject>Valves</subject><issn>0954-4062</issn><issn>2041-2983</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2006</creationdate><recordtype>article</recordtype><sourceid>BENPR</sourceid><recordid>eNqF0c1LwzAUAPAgCs7p2WtR8GRdPpvmKGN-MfEwPZc0e9WOdK1JO9b_3pR5kMEwlwTe772X5CF0SfAdoZxNsBKc44S-vM4WRMojNKKYk5iqlB2j0RCNh_ApOvN-hcOiiRihxaKsGguRb11n2s7BMmpq2y_LCtqv3vrS1lu9hqgqjas32m4g0sHpNsC8j2DbgltrG-nSRY0D70OJc3RSaOvh4ncfo4-H2fv0KZ6_PT5P7-exYUq0sRRSLYnKQQhulMxzGc6cEaFUmghSkBSrgqWGayGYTI0CqjXkKVWS4NQINkY3u7qNq7878G1Wld6AteHCdeczllAmGVX_QqooThJOA7zag6u6G94XDOMKCylZQNeHEFFSJolQcug52anwb947KLLGlZV2fUZwNgws2xtYyLjdZXj9CX9qHuA_RPCVEQ</recordid><startdate>20060801</startdate><enddate>20060801</enddate><creator>Lee, S-W</creator><creator>Kim, D-J</creator><creator>Ahn, Y</creator><creator>Chai, Y G</creator><general>SAGE Publications</general><general>SAGE PUBLICATIONS, INC</general><scope>AAYXX</scope><scope>CITATION</scope><scope>7TB</scope><scope>8FD</scope><scope>F28</scope><scope>FR3</scope><scope>3V.</scope><scope>7XB</scope><scope>88I</scope><scope>8AF</scope><scope>8AO</scope><scope>8FE</scope><scope>8FG</scope><scope>8FK</scope><scope>ABJCF</scope><scope>ABUWG</scope><scope>AFKRA</scope><scope>AZQEC</scope><scope>BENPR</scope><scope>BGLVJ</scope><scope>CCPQU</scope><scope>DWQXO</scope><scope>GNUQQ</scope><scope>HCIFZ</scope><scope>L6V</scope><scope>M2P</scope><scope>M7S</scope><scope>PQEST</scope><scope>PQQKQ</scope><scope>PQUKI</scope><scope>PRINS</scope><scope>PTHSS</scope><scope>Q9U</scope></search><sort><creationdate>20060801</creationdate><title>Simple structured polydimethylsiloxane microvalve actuated by external air pressure</title><author>Lee, S-W ; Kim, D-J ; Ahn, Y ; Chai, Y G</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c395t-7579d19be554c97bb79be4315998651f1809f38c4a55378c9e2aaeb8297108c53</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2006</creationdate><topic>Biocompatibility</topic><topic>Borosilicate glass</topic><topic>External pressure</topic><topic>Fluid dynamics</topic><topic>Fluid flow</topic><topic>Glass substrates</topic><topic>Mechanical engineering</topic><topic>Molding (process)</topic><topic>Molds</topic><topic>Pneumatics</topic><topic>Polydimethylsiloxane</topic><topic>Pressure</topic><topic>Product design</topic><topic>Replicas</topic><topic>Silicone resins</topic><topic>Surface treatment</topic><topic>Valves</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Lee, S-W</creatorcontrib><creatorcontrib>Kim, D-J</creatorcontrib><creatorcontrib>Ahn, Y</creatorcontrib><creatorcontrib>Chai, Y G</creatorcontrib><collection>CrossRef</collection><collection>Mechanical & Transportation Engineering Abstracts</collection><collection>Technology Research Database</collection><collection>ANTE: Abstracts in New Technology & Engineering</collection><collection>Engineering Research Database</collection><collection>ProQuest Central (Corporate)</collection><collection>ProQuest Central (purchase pre-March 2016)</collection><collection>Science Database (Alumni Edition)</collection><collection>STEM Database</collection><collection>ProQuest Pharma Collection</collection><collection>ProQuest SciTech Collection</collection><collection>ProQuest Technology Collection</collection><collection>ProQuest Central (Alumni) (purchase pre-March 2016)</collection><collection>Materials Science & Engineering Collection</collection><collection>ProQuest Central (Alumni Edition)</collection><collection>ProQuest Central UK/Ireland</collection><collection>ProQuest Central Essentials</collection><collection>ProQuest Central</collection><collection>Technology Collection</collection><collection>ProQuest One Community College</collection><collection>ProQuest Central Korea</collection><collection>ProQuest Central Student</collection><collection>SciTech Premium Collection</collection><collection>ProQuest Engineering Collection</collection><collection>Science Database</collection><collection>Engineering Database</collection><collection>ProQuest One Academic Eastern Edition (DO NOT USE)</collection><collection>ProQuest One Academic</collection><collection>ProQuest One Academic UKI Edition</collection><collection>ProQuest Central China</collection><collection>Engineering Collection</collection><collection>ProQuest Central Basic</collection><jtitle>Proceedings of the Institution of Mechanical Engineers. Part C, Journal of mechanical engineering science</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Lee, S-W</au><au>Kim, D-J</au><au>Ahn, Y</au><au>Chai, Y G</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Simple structured polydimethylsiloxane microvalve actuated by external air pressure</atitle><jtitle>Proceedings of the Institution of Mechanical Engineers. Part C, Journal of mechanical engineering science</jtitle><date>2006-08-01</date><risdate>2006</risdate><volume>220</volume><issue>8</issue><spage>1283</spage><epage>1288</epage><pages>1283-1288</pages><issn>0954-4062</issn><eissn>2041-2983</eissn><abstract>Abstract
This article describes a simple structured microvalve made of polydimethylsiloxane (PDMS) and glass. For easy operation, the microvalve is actuated by external air pressure. The microvalve is fabricated by replica moulding using a negative photoresist (SU-8) as the mould. For low cost and biocompatibility, PDMS is used as the chip material. The PDMS valve is bonded to a Pyrex glass substrate using an O2 plasma surface treatment. It was found that no leakage occurs under a valve-actuating air pressure of 0.35 MPa when the injection pressure of liquid in the microchannel of the valve is 0.01-0.04 MPa. The fabricated microvalve is applied to a microfluidic chip having one inlet and two outlet channels. Fluid flow is controlled by the microvalve.</abstract><cop>London, England</cop><pub>SAGE Publications</pub><doi>10.1243/09544062JMES177</doi><tpages>6</tpages></addata></record> |
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| ispartof | Proceedings of the Institution of Mechanical Engineers. Part C, Journal of mechanical engineering science, 2006-08, Vol.220 (8), p.1283-1288 |
| issn | 0954-4062 2041-2983 |
| language | eng |
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| source | SAGE Complete |
| subjects | Biocompatibility Borosilicate glass External pressure Fluid dynamics Fluid flow Glass substrates Mechanical engineering Molding (process) Molds Pneumatics Polydimethylsiloxane Pressure Product design Replicas Silicone resins Surface treatment Valves |
| title | Simple structured polydimethylsiloxane microvalve actuated by external air pressure |
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