Role of transmission electron microscopy in the semiconductor industry for process development and failure analysis

Transmission electron microscope (TEM) based techniques offer superior spatial resolution and highly sensitive elemental analysis capabilities that can be exploited for metrology and materials characterization of sub-nanometer sized device features in advanced semiconductor technologies. TEM based t...

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Veröffentlicht in:	Progress in crystal growth and characterization of materials 2009-09, Vol.55 (3), p.63-97
Hauptverfasser:	Rai, Raghaw S., Subramanian, Swaminathan
Format:	Artikel
Sprache:	eng
Schlagworte:	A1 Characterization A1 Failure Analysis A1 sub-nanometer device features A1 Transmission Electron microscopy Applied sciences B2 Semiconducting materials B3 Semiconducting devices Electronics Exact sciences and technology Materials
Online-Zugang:	Volltext
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