Electronic properties of thin films of laser-ablated Al2O3

Laser ablation coupled to mass quadrupole spectrometry (LAMQS) has been used to prepare thin films of aluminum oxide deposited on Si substrates starting from commercial Al2O3 polycrystalline targets. X-ray photoemission (XPS) and reflection electron energy loss spectroscopy (REELS) have allowed the...

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Veröffentlicht in:	Applied surface science 2009-01, Vol.255 (7), p.4123-4128
Hauptverfasser:	Mezzasalma, A.M., Mondio, G., Serafino, T., Caridi, F., Torrisi, L.
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
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