A metallic micropump for high-pressure microfluidics

This paper presents one of the strongest mechanical sub-cm3 sized micropumps for microfluidics. It consists of two active valves and one pumping chamber, each operated by a paraffin actuator that is driven by a low-voltage square pulse waveform. The pump is fabricated in a simple process using paryl...

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Veröffentlicht in:	Journal of micromechanics and microengineering 2008-11, Vol.18 (11), p.115009-115009 (7)
Hauptverfasser:	Bodén, Roger, Hjort, Klas, Schweitz, Jan-Åke, Simu, Urban
Format:	Artikel
Sprache:	eng
Schlagworte:	Applied fluid mechanics Applied sciences Electronics Exact sciences and technology Fluid dynamics Fluidics Fundamental areas of phenomenology (including applications) Instruments, apparatus, components and techniques common to several branches of physics and astronomy Mechanical engineering. Machine design Mechanical instruments, equipment and techniques Microelectronic fabrication (materials and surfaces technology) Micromechanical devices and systems Physics Precision engineering, watch making Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices TECHNOLOGY TEKNIKVETENSKAP
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