Evaluation of Laser Scattering Technique and Spectroscopic Ellipsometry for In-Line Ion Implantation Characterization

Today, most semi-conductor fabrication units are looking for fast and cheap in-line characterization tools to develop and monitor each process step. In this study, we evaluated new ways to characterize as-implanted process by ion implantation with equipment typically dedicated for other applications...

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Bibliographische Detailangaben

Hauptverfasser:	Milesi, F, Nolot, E, Mehrez, Z, Mazen, F, Favier, S
Format:	Tagungsbericht
Sprache:	eng
Online-Zugang:	Volltext
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