Temperature-Dependence of SiC MOSFET Threshold-Voltage Instability

Temperature-Dependence of SiC MOSFET Threshold-Voltage Instability

We have observed variations in the instability in the threshold voltage, VT, of SiC metaloxide semiconductor field-effect transistors (MOSFETs) from various sources and/or processes due to gate-bias stressing as a function of temperature. In some cases we see a dramatic increase in the instability w...

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Veröffentlicht in:Materials science forum 2009-01, Vol.600-603, p.807-810
Hauptverfasser: Green, Ronald, Habersat, Daniel B., Lelis, Aivars J., Goldsman, Neil
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Habersat, Daniel B.
Lelis, Aivars J.
Goldsman, Neil
description We have observed variations in the instability in the threshold voltage, VT, of SiC metaloxide semiconductor field-effect transistors (MOSFETs) from various sources and/or processes due to gate-bias stressing as a function of temperature. In some cases we see a dramatic increase in the instability with increasing temperature, consistent with interfacial charge trapping or de-trapping. In other cases the temperature response is very slight, and in still other cases we actually see VT instabilities that move in the opposite direction with bias, indicating the presence of mobile ions.
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