Molecular depth profiling of polymers with very low energy ions

The need for a molecular depth profiling technique to study organic layers has become a strong incentive in the SIMS community in the last few years, especially with the recent successes obtained with cluster ion beam depth profiling. In this work, we have investigated a thoroughly different approac...

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Veröffentlicht in:	Applied surface science 2008-12, Vol.255 (4), p.970-972
Hauptverfasser:	Houssiau, L., Douhard, B., Mine, N.
Format:	Artikel
Sprache:	eng
Schlagworte:	Cs sputtering Organic depth profile Oxygen sputtering PET PMMA
Online-Zugang:	Volltext
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