Development of a high lateral resolution TOF-SIMS apparatus for single particle analysis

A novel TOF-SIMS apparatus was designed and constructed aiming at single small particle analysis. The apparatus consisted of high lateral resolution TOF-SIMS part and SEM function for seeking analytical target. A pulsed Ga-focused ion beam (FIB) was also newly developed for this purpose based on sta...

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Veröffentlicht in:	Applied surface science 2008-12, Vol.255 (4), p.1617-1620
Hauptverfasser:	Sakamoto, Tetsuo, Koizumi, Masaomi, Kawasaki, Jyunji, Yamaguchi, Jyun
Format:	Artikel
Sprache:	eng
Schlagworte:	Cross-section Lateral resolution Particle Secondary ion yield TOF-SIMS
Online-Zugang:	Volltext
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