Effect of hydrogen on the physical and mechanical properties of silicon carbide-derived carbon films
In this study, the effect of hydrogen on the structure and mechanical properties of carbon films produced by selective etching of monolithic SiC was examined. The process to produce carbon films from SiC (i.e., SiC-derived carbon, CDC) was carried out in a gas mixture of Cl 2 and H 2 at 1000 °C for...
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| Veröffentlicht in: | Surface & coatings technology 2009-12, Vol.204 (6), p.1018-1021 |
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| creator | Choi, Hyun-Ju Bae, Heung-Taek McNallan, Michael J. Sohn, Yong-Ho Lim, Dae-Soon |
| description | In this study, the effect of hydrogen on the structure and mechanical properties of carbon films produced by selective etching of monolithic SiC was examined. The process to produce carbon films from SiC (i.e., SiC-derived carbon, CDC) was carried out in a gas mixture of Cl
2 and H
2 at 1000 °C for 20 h. The Raman intensity ratio,
I
D/
I
G, where subscripts D and G refer to diamond and graphite, decreased as the hydrogen concentration in the gas mixture increased, indicating a decrease in the sp
2 carbon cluster. XRD analysis also showed that the fraction of graphitization decreased as the hydrogen concentration increased. The addition of hydrogen that prevented the formation of graphite (sp
2 bonding) also resulted in a reduction in the film thickness. The hardness and elastic modulus of the carbon films tended to decrease as the H
2 content increased owing to the contribution from the C–H bond and the nano-size pore. |
| doi_str_mv | 10.1016/j.surfcoat.2009.05.023 |
| format | Article |
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2 and H
2 at 1000 °C for 20 h. The Raman intensity ratio,
I
D/
I
G, where subscripts D and G refer to diamond and graphite, decreased as the hydrogen concentration in the gas mixture increased, indicating a decrease in the sp
2 carbon cluster. XRD analysis also showed that the fraction of graphitization decreased as the hydrogen concentration increased. The addition of hydrogen that prevented the formation of graphite (sp
2 bonding) also resulted in a reduction in the film thickness. The hardness and elastic modulus of the carbon films tended to decrease as the H
2 content increased owing to the contribution from the C–H bond and the nano-size pore.</description><identifier>ISSN: 0257-8972</identifier><identifier>EISSN: 1879-3347</identifier><identifier>DOI: 10.1016/j.surfcoat.2009.05.023</identifier><identifier>CODEN: SCTEEJ</identifier><language>eng</language><publisher>Amsterdam: Elsevier B.V</publisher><subject>Applied sciences ; Chlorination ; Cross-disciplinary physics: materials science; rheology ; Exact sciences and technology ; Graphitization ; Materials science ; Mechanical properties and methods of testing. Rheology. Fracture mechanics. Tribology ; Metals. Metallurgy ; Methods of deposition of films and coatings; film growth and epitaxy ; Nanoindentation ; Physics ; Plasticity ; Silicon carbide ; Surface treatments</subject><ispartof>Surface & coatings technology, 2009-12, Vol.204 (6), p.1018-1021</ispartof><rights>2009 Elsevier B.V.</rights><rights>2015 INIST-CNRS</rights><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c476t-afbcadb7a16edbd7ca5dd6f91ef6f66001edd28d38cdbdbb76a4ccd7ec2fb4203</citedby><cites>FETCH-LOGICAL-c476t-afbcadb7a16edbd7ca5dd6f91ef6f66001edd28d38cdbdbb76a4ccd7ec2fb4203</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://dx.doi.org/10.1016/j.surfcoat.2009.05.023$$EHTML$$P50$$Gelsevier$$H</linktohtml><link.rule.ids>310,311,315,781,785,790,791,3551,23935,23936,25145,27929,27930,46000</link.rule.ids><backlink>$$Uhttp://pascal-francis.inist.fr/vibad/index.php?action=getRecordDetail&idt=22483113$$DView record in Pascal Francis$$Hfree_for_read</backlink></links><search><creatorcontrib>Choi, Hyun-Ju</creatorcontrib><creatorcontrib>Bae, Heung-Taek</creatorcontrib><creatorcontrib>McNallan, Michael J.</creatorcontrib><creatorcontrib>Sohn, Yong-Ho</creatorcontrib><creatorcontrib>Lim, Dae-Soon</creatorcontrib><title>Effect of hydrogen on the physical and mechanical properties of silicon carbide-derived carbon films</title><title>Surface & coatings technology</title><description>In this study, the effect of hydrogen on the structure and mechanical properties of carbon films produced by selective etching of monolithic SiC was examined. The process to produce carbon films from SiC (i.e., SiC-derived carbon, CDC) was carried out in a gas mixture of Cl
2 and H
2 at 1000 °C for 20 h. The Raman intensity ratio,
I
D/
I
G, where subscripts D and G refer to diamond and graphite, decreased as the hydrogen concentration in the gas mixture increased, indicating a decrease in the sp
2 carbon cluster. XRD analysis also showed that the fraction of graphitization decreased as the hydrogen concentration increased. The addition of hydrogen that prevented the formation of graphite (sp
2 bonding) also resulted in a reduction in the film thickness. The hardness and elastic modulus of the carbon films tended to decrease as the H
2 content increased owing to the contribution from the C–H bond and the nano-size pore.</description><subject>Applied sciences</subject><subject>Chlorination</subject><subject>Cross-disciplinary physics: materials science; rheology</subject><subject>Exact sciences and technology</subject><subject>Graphitization</subject><subject>Materials science</subject><subject>Mechanical properties and methods of testing. Rheology. Fracture mechanics. Tribology</subject><subject>Metals. Metallurgy</subject><subject>Methods of deposition of films and coatings; film growth and epitaxy</subject><subject>Nanoindentation</subject><subject>Physics</subject><subject>Plasticity</subject><subject>Silicon carbide</subject><subject>Surface treatments</subject><issn>0257-8972</issn><issn>1879-3347</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2009</creationdate><recordtype>article</recordtype><recordid>eNqFkMtOwzAQRS0EEuXxCygb2CXYTmInOxDiJSGxgbXlzIypqzQpdorUv8dtgS2r0czcO4_D2IXgheBCXS-KuA4ORjsVkvO24HXBZXnAZqLRbV6WlT5kMy5rnTetlsfsJMYF51zotpoxvHeOYMpGl803GMYPGrJxyKY5Zav5JnqwfWYHzJYEczvs0lUYVxQmT3Hrir73kBxgQ-eRcqTgvwh3eSo73y_jGTtyto90_hNP2fvD_dvdU_7y-vh8d_uSQ6XVlFvXgcVOW6EIO9Rga0TlWkFOOaXSyYQoGywbSO2u08pWAKgJpOsqyctTdrWfm078XFOczNJHoL63A43raMpaNFw0KgnVXghhjDGQM6vglzZsjOBmC9UszC9Us4VqeG0S1GS8_NlgY2Lhgh3Axz-3lFVTCrHV3ex1lN798hRMBE8DEPqQcBsc_X-rvgFNM5TI</recordid><startdate>20091225</startdate><enddate>20091225</enddate><creator>Choi, Hyun-Ju</creator><creator>Bae, Heung-Taek</creator><creator>McNallan, Michael J.</creator><creator>Sohn, Yong-Ho</creator><creator>Lim, Dae-Soon</creator><general>Elsevier B.V</general><general>Elsevier</general><scope>IQODW</scope><scope>AAYXX</scope><scope>CITATION</scope><scope>7SR</scope><scope>8BQ</scope><scope>8FD</scope><scope>JG9</scope></search><sort><creationdate>20091225</creationdate><title>Effect of hydrogen on the physical and mechanical properties of silicon carbide-derived carbon films</title><author>Choi, Hyun-Ju ; Bae, Heung-Taek ; McNallan, Michael J. ; Sohn, Yong-Ho ; Lim, Dae-Soon</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c476t-afbcadb7a16edbd7ca5dd6f91ef6f66001edd28d38cdbdbb76a4ccd7ec2fb4203</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2009</creationdate><topic>Applied sciences</topic><topic>Chlorination</topic><topic>Cross-disciplinary physics: materials science; rheology</topic><topic>Exact sciences and technology</topic><topic>Graphitization</topic><topic>Materials science</topic><topic>Mechanical properties and methods of testing. Rheology. Fracture mechanics. Tribology</topic><topic>Metals. Metallurgy</topic><topic>Methods of deposition of films and coatings; film growth and epitaxy</topic><topic>Nanoindentation</topic><topic>Physics</topic><topic>Plasticity</topic><topic>Silicon carbide</topic><topic>Surface treatments</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Choi, Hyun-Ju</creatorcontrib><creatorcontrib>Bae, Heung-Taek</creatorcontrib><creatorcontrib>McNallan, Michael J.</creatorcontrib><creatorcontrib>Sohn, Yong-Ho</creatorcontrib><creatorcontrib>Lim, Dae-Soon</creatorcontrib><collection>Pascal-Francis</collection><collection>CrossRef</collection><collection>Engineered Materials Abstracts</collection><collection>METADEX</collection><collection>Technology Research Database</collection><collection>Materials Research Database</collection><jtitle>Surface & coatings technology</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Choi, Hyun-Ju</au><au>Bae, Heung-Taek</au><au>McNallan, Michael J.</au><au>Sohn, Yong-Ho</au><au>Lim, Dae-Soon</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Effect of hydrogen on the physical and mechanical properties of silicon carbide-derived carbon films</atitle><jtitle>Surface & coatings technology</jtitle><date>2009-12-25</date><risdate>2009</risdate><volume>204</volume><issue>6</issue><spage>1018</spage><epage>1021</epage><pages>1018-1021</pages><issn>0257-8972</issn><eissn>1879-3347</eissn><coden>SCTEEJ</coden><abstract>In this study, the effect of hydrogen on the structure and mechanical properties of carbon films produced by selective etching of monolithic SiC was examined. The process to produce carbon films from SiC (i.e., SiC-derived carbon, CDC) was carried out in a gas mixture of Cl
2 and H
2 at 1000 °C for 20 h. The Raman intensity ratio,
I
D/
I
G, where subscripts D and G refer to diamond and graphite, decreased as the hydrogen concentration in the gas mixture increased, indicating a decrease in the sp
2 carbon cluster. XRD analysis also showed that the fraction of graphitization decreased as the hydrogen concentration increased. The addition of hydrogen that prevented the formation of graphite (sp
2 bonding) also resulted in a reduction in the film thickness. The hardness and elastic modulus of the carbon films tended to decrease as the H
2 content increased owing to the contribution from the C–H bond and the nano-size pore.</abstract><cop>Amsterdam</cop><pub>Elsevier B.V</pub><doi>10.1016/j.surfcoat.2009.05.023</doi><tpages>4</tpages></addata></record> |
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| subjects | Applied sciences Chlorination Cross-disciplinary physics: materials science rheology Exact sciences and technology Graphitization Materials science Mechanical properties and methods of testing. Rheology. Fracture mechanics. Tribology Metals. Metallurgy Methods of deposition of films and coatings film growth and epitaxy Nanoindentation Physics Plasticity Silicon carbide Surface treatments |
| title | Effect of hydrogen on the physical and mechanical properties of silicon carbide-derived carbon films |
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