A process-driven computing model for reconfigurable semiconductor manufacturing

Reconfigurability is essential for semiconductor manufacturing systems to remain competitive. Reconfigurable systems avoid costly modifications required to change and adapt to changes in product, production and services. A fully automated, collaborative, and integrated while reconfigurable manufactu...

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Bibliographische Detailangaben

Veröffentlicht in:	Robotics and computer-integrated manufacturing 2008-12, Vol.24 (6), p.709-721
Hauptverfasser:	Qiu, Robin G., Tang, Gina Y., Joshi, Sanjay B.
Format:	Artikel
Sprache:	eng
Schlagworte:	Factory automation Formal model Reconfigurable process controller Reconfigurable system
Online-Zugang:	Volltext
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