Production of B₄C coatings by CVD method in a dual impinging-jet reactor: Chemical yield, morphology, and hardness analysis

β-rhombohedral boron carbide (B₄C) was deposited on a tungsten substrate from a BCl₃---H₂---CH₄ gas mixture in a dual impinging-jet chemical vapor deposition reactor. On-line FTIR analysis of the product stream proved the formation of BHCl₂ and HCl as by products, in a competing parallel reaction. A...

Ausführliche Beschreibung

Bibliographische Detailangaben

Veröffentlicht in:	AIChE journal 2009-11, Vol.55 (11), p.2914-2919
Hauptverfasser:	Karaman, Mustafa, Sezgi, N. Aslı, Özbelge, H. Önder
Format:	Artikel
Sprache:	eng
Schlagworte:	Applied sciences boron carbide ceramics Chemical engineering chemical vapor deposition Exact sciences and technology Reactors refractory carbides
Online-Zugang:	Volltext
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!