Influence of radio frequency power on structure and ionic conductivity of LiPON thin films

Lithium phosphorus oxynitride (LiPON) thin films as solid electrolytes were prepared by radio frequency magnetron sputtering of a Li 3 PO 4 target in ambient nitrogen atmosphere. The influence of radio frequency (rf) power on the structure and the ionic conductivity of LiPON thin films has been inve...

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Veröffentlicht in:	Bulletin of materials science 2008-08, Vol.31 (4), p.681-686
Hauptverfasser:	Hu, Zongqian, Li, Dezhan, Xie, Kai
Format:	Artikel
Sprache:	eng
Schlagworte:	Chemistry and Materials Science Engineering Impedance measurement Ion currents Ionic conductivity Lithium Magnetron sputtering Materials Science Molten salt electrolytes Photoelectrons Radio frequencies Radio frequency Relativity Scanning electron microscopy Solid electrolytes Spectrum analysis Thin films X ray photoelectron spectroscopy X-rays
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