Fourier transform Raman spectroscopic and scanning electron microscopic studies of chemical vapor deposited diamond-like carbon films

A combined study based on scanning electron microscopy and Fourier transform Raman spectroscopy is presented for different kinds of diamond films. These films were obtained by the hot filament chemical vapor deposition (HFCVD) technique with both silica (SiO2) and silicon (Si) being used as substrat...

Ausführliche Beschreibung

Bibliographische Detailangaben

Veröffentlicht in:	Journal of Raman spectroscopy 1994-01, Vol.25 (1), p.67-73
Hauptverfasser:	Bist, H. D., Bhargava, S., Little, T. S., Gardner Jr, J. K., Durig, J. R., Sahli, S., Aslam, M.
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!