Probing the diffusion of vacuum ultraviolet ( λ = 172 nm) induced oxidants by nanoparticles immobilization

Vacuum ultraviolet (VUV, λ = 172 nm) patterning of alkyl monolayer on silicon surface has been demonstrated with emphasis on the diffusion of VUV induced oxygen-derived active species, which are accountable for the pattern broadening. The VUV photons photo-dissociates the atmospheric oxygen and wate...

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Veröffentlicht in:	Applied surface science 2009-09, Vol.255 (24), p.9817-9821
Hauptverfasser:	Khatri, Om P., Hatanaka, Takeshi, Murase, Kuniaki, Sugimura, Hiroyuki
Format:	Artikel
Sprache:	eng
Schlagworte:	Condensed matter: electronic structure, electrical, magnetic, and optical properties Condensed matter: structure, mechanical and thermal properties Cross-disciplinary physics: materials science rheology Exact sciences and technology Gold nanoparticles Monolayer Photo-oxidation Physics VUV patterning
Online-Zugang:	Volltext
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