High-precision sample stage for photoemission microscopy of organic films

A high-precision sample stage for photoemission microscopy has been constructed to translate the sample by ±3 mm with accuracy better than 100 nm. The stage is actuated by step motors settled outside the vacuum. The accuracies of the translations were measured by observing a standard patterned sampl...

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Veröffentlicht in:	Journal of electron spectroscopy and related phenomena 2009-08, Vol.174 (1), p.131-135
Hauptverfasser:	Yamamoto, I., Matsuura, N., Miyakubo, K., Yamada, T., Munakata, T.
Format:	Artikel
Sprache:	eng
Schlagworte:	Electronic structure Organic semiconductor Photoemission electron microscopy (PEEM) Photoemission microspectroscopy Phthalocyanine Thin film growth
Online-Zugang:	Volltext
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