High-precision sample stage for photoemission microscopy of organic films

A high-precision sample stage for photoemission microscopy has been constructed to translate the sample by ±3 mm with accuracy better than 100 nm. The stage is actuated by step motors settled outside the vacuum. The accuracies of the translations were measured by observing a standard patterned sampl...

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Veröffentlicht in:Journal of electron spectroscopy and related phenomena 2009-08, Vol.174 (1), p.131-135
Hauptverfasser: Yamamoto, I., Matsuura, N., Miyakubo, K., Yamada, T., Munakata, T.
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container_end_page 135
container_issue 1
container_start_page 131
container_title Journal of electron spectroscopy and related phenomena
container_volume 174
creator Yamamoto, I.
Matsuura, N.
Miyakubo, K.
Yamada, T.
Munakata, T.
description A high-precision sample stage for photoemission microscopy has been constructed to translate the sample by ±3 mm with accuracy better than 100 nm. The stage is actuated by step motors settled outside the vacuum. The accuracies of the translations were measured by observing a standard patterned sample with a photoemission electron microscope (PEEM) of 50 nm resolution. The accuracy was nearly independent of the distance of each translation step and the error was not accumulated by repeated steps. After round-trip translations up to 0.2 mm, the sample came back to the original position with accuracy of ±50 nm. The performance of the stage was demonstrated by observing growth processes of lead phthalocyanine (PbPc) films formed on graphite.
doi_str_mv 10.1016/j.elspec.2009.04.009
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source Elsevier ScienceDirect Journals
subjects Electronic structure
Organic semiconductor
Photoemission electron microscopy (PEEM)
Photoemission microspectroscopy
Phthalocyanine
Thin film growth
title High-precision sample stage for photoemission microscopy of organic films
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