High-precision sample stage for photoemission microscopy of organic films
A high-precision sample stage for photoemission microscopy has been constructed to translate the sample by ±3 mm with accuracy better than 100 nm. The stage is actuated by step motors settled outside the vacuum. The accuracies of the translations were measured by observing a standard patterned sampl...
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Veröffentlicht in: | Journal of electron spectroscopy and related phenomena 2009-08, Vol.174 (1), p.131-135 |
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container_title | Journal of electron spectroscopy and related phenomena |
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creator | Yamamoto, I. Matsuura, N. Miyakubo, K. Yamada, T. Munakata, T. |
description | A high-precision sample stage for photoemission microscopy has been constructed to translate the sample by ±3
mm with accuracy better than 100
nm. The stage is actuated by step motors settled outside the vacuum. The accuracies of the translations were measured by observing a standard patterned sample with a photoemission electron microscope (PEEM) of 50
nm resolution. The accuracy was nearly independent of the distance of each translation step and the error was not accumulated by repeated steps. After round-trip translations up to 0.2
mm, the sample came back to the original position with accuracy of ±50
nm. The performance of the stage was demonstrated by observing growth processes of lead phthalocyanine (PbPc) films formed on graphite. |
doi_str_mv | 10.1016/j.elspec.2009.04.009 |
format | Article |
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mm with accuracy better than 100
nm. The stage is actuated by step motors settled outside the vacuum. The accuracies of the translations were measured by observing a standard patterned sample with a photoemission electron microscope (PEEM) of 50
nm resolution. The accuracy was nearly independent of the distance of each translation step and the error was not accumulated by repeated steps. After round-trip translations up to 0.2
mm, the sample came back to the original position with accuracy of ±50
nm. The performance of the stage was demonstrated by observing growth processes of lead phthalocyanine (PbPc) films formed on graphite.</description><identifier>ISSN: 0368-2048</identifier><identifier>EISSN: 1873-2526</identifier><identifier>DOI: 10.1016/j.elspec.2009.04.009</identifier><language>eng</language><publisher>Elsevier B.V</publisher><subject>Electronic structure ; Organic semiconductor ; Photoemission electron microscopy (PEEM) ; Photoemission microspectroscopy ; Phthalocyanine ; Thin film growth</subject><ispartof>Journal of electron spectroscopy and related phenomena, 2009-08, Vol.174 (1), p.131-135</ispartof><rights>2009 Elsevier B.V.</rights><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c434t-634d348e2f61de409673d869b6b2859a9e74ec360dc5de282ec928a6c18e0d4e3</citedby><cites>FETCH-LOGICAL-c434t-634d348e2f61de409673d869b6b2859a9e74ec360dc5de282ec928a6c18e0d4e3</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://www.sciencedirect.com/science/article/pii/S0368204809001121$$EHTML$$P50$$Gelsevier$$H</linktohtml><link.rule.ids>314,776,780,3537,27901,27902,65306</link.rule.ids></links><search><creatorcontrib>Yamamoto, I.</creatorcontrib><creatorcontrib>Matsuura, N.</creatorcontrib><creatorcontrib>Miyakubo, K.</creatorcontrib><creatorcontrib>Yamada, T.</creatorcontrib><creatorcontrib>Munakata, T.</creatorcontrib><title>High-precision sample stage for photoemission microscopy of organic films</title><title>Journal of electron spectroscopy and related phenomena</title><description>A high-precision sample stage for photoemission microscopy has been constructed to translate the sample by ±3
mm with accuracy better than 100
nm. The stage is actuated by step motors settled outside the vacuum. The accuracies of the translations were measured by observing a standard patterned sample with a photoemission electron microscope (PEEM) of 50
nm resolution. The accuracy was nearly independent of the distance of each translation step and the error was not accumulated by repeated steps. After round-trip translations up to 0.2
mm, the sample came back to the original position with accuracy of ±50
nm. The performance of the stage was demonstrated by observing growth processes of lead phthalocyanine (PbPc) films formed on graphite.</description><subject>Electronic structure</subject><subject>Organic semiconductor</subject><subject>Photoemission electron microscopy (PEEM)</subject><subject>Photoemission microspectroscopy</subject><subject>Phthalocyanine</subject><subject>Thin film growth</subject><issn>0368-2048</issn><issn>1873-2526</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2009</creationdate><recordtype>article</recordtype><recordid>eNqFkLtOwzAUhi0EEqXwBgyZ2BKOL3GcBQlVXCpVYoHZcu2T1lUSBztF6tuTUmaY_uG_6JyPkFsKBQUq73cFtmlAWzCAugBRTHJGZlRVPGclk-dkBlyqnIFQl-QqpR0AVCVnM7J89ZttPkS0PvnQZ8l0Q4tZGs0GsybEbNiGMWDn04_deRtDsmE4ZKHJQtyY3tus8W2XrslFY9qEN786Jx_PT--L13z19rJcPK5yK7gYc8mF40IhayR1KKCWFXdK1mu5ZqqsTY2VQMslOFs6ZIqhrZky0lKF4ATyObk77Q4xfO4xjXo6zmLbmh7DPulpvKJKlf8GGYWKVgqmoDgFj7-liI0eou9MPGgK-ghY7_QJsD4C1iD0JFPt4VSbPPzyGHWyHnuLzk84R-2C_3vgGzNQhoo</recordid><startdate>20090801</startdate><enddate>20090801</enddate><creator>Yamamoto, I.</creator><creator>Matsuura, N.</creator><creator>Miyakubo, K.</creator><creator>Yamada, T.</creator><creator>Munakata, T.</creator><general>Elsevier B.V</general><scope>AAYXX</scope><scope>CITATION</scope><scope>7QO</scope><scope>8FD</scope><scope>FR3</scope><scope>P64</scope><scope>7SR</scope><scope>7U5</scope><scope>8BQ</scope><scope>JG9</scope><scope>L7M</scope></search><sort><creationdate>20090801</creationdate><title>High-precision sample stage for photoemission microscopy of organic films</title><author>Yamamoto, I. ; Matsuura, N. ; Miyakubo, K. ; Yamada, T. ; Munakata, T.</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c434t-634d348e2f61de409673d869b6b2859a9e74ec360dc5de282ec928a6c18e0d4e3</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2009</creationdate><topic>Electronic structure</topic><topic>Organic semiconductor</topic><topic>Photoemission electron microscopy (PEEM)</topic><topic>Photoemission microspectroscopy</topic><topic>Phthalocyanine</topic><topic>Thin film growth</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Yamamoto, I.</creatorcontrib><creatorcontrib>Matsuura, N.</creatorcontrib><creatorcontrib>Miyakubo, K.</creatorcontrib><creatorcontrib>Yamada, T.</creatorcontrib><creatorcontrib>Munakata, T.</creatorcontrib><collection>CrossRef</collection><collection>Biotechnology Research Abstracts</collection><collection>Technology Research Database</collection><collection>Engineering Research Database</collection><collection>Biotechnology and BioEngineering Abstracts</collection><collection>Engineered Materials Abstracts</collection><collection>Solid State and Superconductivity Abstracts</collection><collection>METADEX</collection><collection>Materials Research Database</collection><collection>Advanced Technologies Database with Aerospace</collection><jtitle>Journal of electron spectroscopy and related phenomena</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Yamamoto, I.</au><au>Matsuura, N.</au><au>Miyakubo, K.</au><au>Yamada, T.</au><au>Munakata, T.</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>High-precision sample stage for photoemission microscopy of organic films</atitle><jtitle>Journal of electron spectroscopy and related phenomena</jtitle><date>2009-08-01</date><risdate>2009</risdate><volume>174</volume><issue>1</issue><spage>131</spage><epage>135</epage><pages>131-135</pages><issn>0368-2048</issn><eissn>1873-2526</eissn><abstract>A high-precision sample stage for photoemission microscopy has been constructed to translate the sample by ±3
mm with accuracy better than 100
nm. The stage is actuated by step motors settled outside the vacuum. The accuracies of the translations were measured by observing a standard patterned sample with a photoemission electron microscope (PEEM) of 50
nm resolution. The accuracy was nearly independent of the distance of each translation step and the error was not accumulated by repeated steps. After round-trip translations up to 0.2
mm, the sample came back to the original position with accuracy of ±50
nm. The performance of the stage was demonstrated by observing growth processes of lead phthalocyanine (PbPc) films formed on graphite.</abstract><pub>Elsevier B.V</pub><doi>10.1016/j.elspec.2009.04.009</doi><tpages>5</tpages></addata></record> |
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language | eng |
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source | Elsevier ScienceDirect Journals |
subjects | Electronic structure Organic semiconductor Photoemission electron microscopy (PEEM) Photoemission microspectroscopy Phthalocyanine Thin film growth |
title | High-precision sample stage for photoemission microscopy of organic films |
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