Preparation of TiAlN/ZrN and TiCrN/ZrN multilayers by RF magnetron sputtering

Titanium-based nitride coatings on cutting tools, press molds and dies can be used to prolong their life cycle because of their superior corrosion and oxidation resistance. TiAlN/ZrN and TiCrN/ZrN multilayer coatings were prepared by RF magnetron sputtering, and their microstructural evolution and c...

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Veröffentlicht in:Transactions of Nonferrous Metals Society of China 2009-08, Vol.19 (4), p.795-799
Hauptverfasser: LEE, Jong-Kook, YANG, Gwon-Seung
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YANG, Gwon-Seung
description Titanium-based nitride coatings on cutting tools, press molds and dies can be used to prolong their life cycle because of their superior corrosion and oxidation resistance. TiAlN/ZrN and TiCrN/ZrN multilayer coatings were prepared by RF magnetron sputtering, and their microstructural evolution and corrosion resistance during beat treatment were investigated. The TiAlN/ZrN and TiCrN/ZrN multilayer coatings are degraded by heating up to 600 ℃ with the formation of oxides particles on the surface. During the heat treatment, the TiCrN/ZrN and TiAlN/ZrN multilayer coatings show the lowest corrosion current density and the highest polarization resistance at temperature range of 400-500℃. Consequently, the TiAlN/ZrN and TiCrN/ZrN multilayer coatings show good corrosion resistance at temperature range of 400-500 ℃ during heating.
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subjects multilayer coating
RF magnetron sputtering
TiAlN/ZrN
TiCrN/ZrN
多层膜
射频磁控溅射
氮化锆
溅射制备
耐腐蚀性
腐蚀电流密度
title Preparation of TiAlN/ZrN and TiCrN/ZrN multilayers by RF magnetron sputtering
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