Influence of the beam current density distribution on the spatial resolution of a nuclear microprobe

The paper discusses the effect of nonuniform distribution of the ion beam phase density on the nuclear microprobe resolution. The deconvolution of the beam brightness distribution parameters was performed on the base of the beam current distribution measurements in the object collimator plane. This...

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Veröffentlicht in:	Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms Beam interactions with materials and atoms, 2009-06, Vol.267 (12), p.2041-2045
Hauptverfasser:	Ponomarov, A.A., Miroshnichenko, V.I., Ponomarev, A.G.
Format:	Artikel
Sprache:	eng
Schlagworte:	Acceptance Beam current density distribution Microprobe spatial resolution Probe-forming system
Online-Zugang:	Volltext
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