Influence of growth pressure on the electrical properties of boron-doped polycrystalline diamond films

Heavily boron-doped diamond films are synthesized by the hot-filament chemical vapor deposition method under the gas mixtures of H 2, CH 4 and trimethyl borate. The measurement results of scanning electron microscopy, Raman spectroscopy, X-ray diffractometer and electrical properties showed the morp...

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Veröffentlicht in:	Applied surface science 2009-09, Vol.255 (23), p.9522-9525
Hauptverfasser:	Wang, Z.L., Lu, C., Li, J.J., Gu, C.Z.
Format:	Artikel
Sprache:	eng
Schlagworte:	Boron-doped diamond films Chemical vapor deposition (including plasma-enhanced cvd, mocvd, etc.) Condensed matter: electronic structure, electrical, magnetic, and optical properties Condensed matter: structure, mechanical and thermal properties Cross-disciplinary physics: materials science rheology Exact sciences and technology HFCVD Materials science Methods of deposition of films and coatings film growth and epitaxy Physics Structure and morphology thickness Superconductivity Surfaces and interfaces thin films and whiskers (structure and nonelectronic properties) Thin film structure and morphology
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