Long Carrier Lifetime in 4H-SiC Epilayers Using Chlorinated Precursors

In this work we report the measurement of minority carrier lifetimes using the time resolved photoluminescence technique. It was found that 4H-SiC homo-epilayers grown using chlorine-based precursors have longer carrier lifetimes if used in conjunction with a tantalum carbide coated (TaC-coated) gra...

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Veröffentlicht in:	Materials science forum 2009-01, Vol.615-617, p.291-294
Hauptverfasser:	Shrivastava, Amitesh, Sudarshan, Tangali S., Caldwell, Joshua D., Klein, Paul B., Bolotnikov, A.V., Glaser, E.R.
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
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