Chloride-Based SiC Epitaxial Growth

Some aspects of the chloride-based CVD growth process have been investigated by using both the approach to add HCl to the standard precursors or/and by using the single molecule precursor methyltrichlorosilane (MTS). The efficiency of the process for different precursors, the growth rate stability a...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Lundskog, A., Beyer, Franziska Christine, Pedersen, Henrik, Leone, Stefano, Henry, Anne, Janzén, Erik
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	NATURAL SCIENCES NATURVETENSKAP
Online-Zugang:	Volltext
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