Influence of Al-doping on the structure and optical properties of ZnO films

Al-doped ZnO (ZnO:Al) thin films with c-axis preferred orientation were deposited on glass substrates using the radio frequency reactive magnetron sputtering technique. The effect of Al concentrations on the microstructure and the luminescence properties of the ZnO:Al thin films were studied by atom...

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Veröffentlicht in:	Physica. B, Condensed matter Condensed matter, 2009-08, Vol.404 (16), p.2439-2443
Hauptverfasser:	Ding, J.J., Ma, S.Y., Chen, H.X., Shi, X.F., Zhou, T.T., Mao, L.M.
Format:	Artikel
Sprache:	eng
Schlagworte:	Atomic force microscopy Condensed matter: electronic structure, electrical, magnetic, and optical properties Exact sciences and technology Ii-vi semiconductors Optical properties Optical properties and condensed-matter spectroscopy and other interactions of matter with particles and radiation Optical properties of specific thin films Physics Quantum confinement effect RF magnetron sputtering X-ray diffraction ZnO thin films
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