Design, process and characterisation of a high-performance vibration sensor for wireless condition monitoring

A microelectromechanical system (MEMS) accelerometer has been developed for wireless vibration measurements on AC motors for condition monitoring. It should be a part of a cost-effective solution for a miniaturized sensor node. The requirements for such the sensor are a resonance frequency of at lea...

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Veröffentlicht in:	Sensors and actuators. A. Physical. 2009-08, Vol.153 (2), p.155-161
Hauptverfasser:	Vogl, Andreas, Wang, Dag T., Storås, Preben, Bakke, Thor, Taklo, Maaike M.V., Thomson, Allan, Balgård, Lennart
Format:	Artikel
Sprache:	eng
Schlagworte:	BCB DRIE Vibration sensor design Wafer bonding Wireless sensor network
Online-Zugang:	Volltext
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