Direct Fabrication of Nanoscale Light Emitting Diode on Silicon Probe Tip for Scanning Microscopy

We have fabricated a silicon microprobe integrated with a nanometer-sized light emitting diode (Nano-LED) on the tip. This paper describes the fabrication procedure and preliminary topographic testing results. The silicon probe with electrode pattern was made by wet-etching a silicon-on-insulator wa...

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Veröffentlicht in:	Journal of microelectromechanical systems 2008-02, Vol.17 (1), p.4-10
Hauptverfasser:	Hoshino, K., Rozanski, L.J., Vanden Bout, D.A., Xiaojing Zhang
Format:	Artikel
Sprache:	eng
Schlagworte:	Cadmium selenides Chromium Condensed matter: electronic structure, electrical, magnetic, and optical properties Current measurement Electrodes Electrooptical effects Exact sciences and technology Fabrication Instruments, apparatus, components and techniques common to several branches of physics and astronomy Ion beams Light emitting diodes Light emitting diodes (LEDs) Materials science Mechanical instruments, equipment and techniques Micromechanical devices and systems Microscopy Nanocomposites Nanomaterials Nanoparticles Nanostructure near-field scanning optical microscopy (NSOM) Optical properties and condensed-matter spectroscopy and other interactions of matter with particles and radiation Optical properties of bulk materials and thin films Particle measurements Physics Probes semiconductor nanoparticles Semiconductors Silicon Testing
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