Nanostructure and paramagnetic centres in diamond-like carbon: Effect of Ar dilution in PECVD process

Diamond-like carbon (DLC) films were deposited utilising plasma enhanced chemical vapour deposition (PECVD) with acetylene precursor, diluted with 0–45% argon. Electron paramagnetic resonance (EPR) measurements show the presence of one paramagnetic centre with no change in spin population over the r...

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Veröffentlicht in:	Diamond and related materials 2008-07, Vol.17 (7), p.1629-1632
Hauptverfasser:	Jones, B.J., Wright, S., Barklie, R.C., Tyas, J., Franks, J., Reynolds, A.J.
Format:	Artikel
Sprache:	eng
Schlagworte:	Chemical vapor deposition (including plasma-enhanced cvd, mocvd, etc.) Condensed matter: electronic structure, electrical, magnetic, and optical properties Cross-disciplinary physics: materials science rheology Defects Diamond-like carbon Electronic structure and electrical properties of surfaces, interfaces, thin films and low-dimensional structures Exact sciences and technology Fullerenes and related materials diamonds, graphite Materials science Methods of deposition of films and coatings film growth and epitaxy Nanoscale materials and structures: fabrication and characterization Other topics in nanoscale materials and structures Paramagnetic resonance Physics Plasma CVD Specific materials Surface and interface electron states Surface characterization Surface states, band structure, electron density of states
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