Input-shaping control of nonlinear MEMS

We develop a new technique for preshaping input commands to control microelectromechanical systems (MEMS). In general, MEMS are excited using an electrostatic field which is a nonlinear function of the states and the input voltage. Due to the nonlinearity, the frequency of the device response to a s...

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Veröffentlicht in:	Nonlinear dynamics 2008-10, Vol.54 (1-2), p.167-179
Hauptverfasser:	Daqaq, M. F., Reddy, C. K., Nayfeh, A. H.
Format:	Artikel
Sprache:	eng
Schlagworte:	Automotive Engineering Classical Mechanics Commands Control Dynamical Systems Electric fields Electric potential Engineering Exact solutions Input shaping Mechanical Engineering Microelectromechanical systems Nonlinear analysis Nonlinear control Nonlinear systems Nonlinearity Original Paper Vibration
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