Study of the oxygen incorporation in Al0.2Ga0.3In0.5P:Be layers grown by MBE employing a P-cracker cell
In this work the incorporation of oxygen in Al0.2Ga0.3In0.5P:Be layers lattice-matched to GaAs grown by solid source molecular beam epitaxy (SSMBE) was studied by secondary ion mass spectrometry (SIMS) and photoluminescence (PL) spectroscopy. By increasing the temperature of the phosphorous cracking...
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Veröffentlicht in: | Journal of crystal growth 2009-03, Vol.311 (7), p.1650-1654 |
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Sprache: | eng |
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